抄録
A micromachined planar spiral inductor was created for the use of a passive mechanoreceptor element in a practical skin-like tactile sensor. The first version of the element was previously reported [1]. This paper shows the results of a simulation of the receptor element that changes inductance when largely deformed. We also report a modified method of fabrication and improves durability dramatically. Finally, we evaluated the validation of the simulation method.
| 本文言語 | English |
|---|---|
| ページ | 206-209 |
| ページ数 | 4 |
| 出版ステータス | Published - 2003 |
| 外部発表 | はい |
| イベント | IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan 継続期間: 2003 1月 19 → 2003 1月 23 |
Conference
| Conference | IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems |
|---|---|
| 国/地域 | Japan |
| City | Kyoto |
| Period | 03/1/19 → 03/1/23 |
ASJC Scopus subject areas
- 制御およびシステム工学
- 機械工学
- 電子工学および電気工学