SMA micro pumps and switching valves for biochemical IC family

A versatile micro fluidic device "Biochemical IC Family" based on the concept of IC chip-set family has been proposed and developed by the authors. Several types of biochemical IC containing multiple micro fluidic devices such as reactors, concentrators and one-way valves have been already developed and we have demonstrated that a luminous enzyme of firefly was synthesized by using these chips. Since all chemical fluids were supply by the external pumps in the past experiment, the micro pump chip and switching valve chip are demanded for total IC family. In this research, New chips to handle chemical fluid were first fabricated successfully and basic performance was verified experimentally. Shape memory alloy (SMA) micro actuator was utilized for micro actuation. A new micro stereo lithography process (Hybrid IH Process) to make 3D composite structures consisting of UV polymer and other micro parts was developed and was utilized for total chip fabrication. The micro pump chip succeeded to supply chemical liquids through the connected chips. On the other hand, the micro switching valve chip changed reaction passes quickly. By using these biochemical IC chips, a new era where various kinds of reaction systems can be constructed by chemists in their own laboratory will come.