Sputter Deposition and Characterization of Sm-Doped Pb(Mg_1/3, Nb_2/3)O-PbTiO Epitaxial Thin Film on Si Toward Giant-Piezoelectric Thin Film for MEMS Actuator Application

Xuanmeng Qi, Shinya Yoshida, Shuji Tanaka

研究成果: Article › 査読

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「Sputter Deposition and Characterization of Sm-Doped Pb(Mg_1/3, Nb_2/3)O-PbTiO Epitaxial Thin Film on Si Toward Giant-Piezoelectric Thin Film for MEMS Actuator Application」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

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Sputter Deposition and Characterization of Sm-Doped Pb(Mg_1/3, Nb_2/3)O-PbTiO Epitaxial Thin Film on Si Toward Giant-Piezoelectric Thin Film for MEMS Actuator Application

フィンガープリント

Engineering & Materials Science

Physics & Astronomy

Sputter Deposition and Characterization of Sm-Doped Pb(Mg1/3, Nb2/3)O-PbTiO Epitaxial Thin Film on Si Toward Giant-Piezoelectric Thin Film for MEMS Actuator Application

フィンガープリント

Engineering & Materials Science

Physics & Astronomy

Sputter Deposition and Characterization of Sm-Doped Pb(Mg_1/3, Nb_2/3)O-PbTiO Epitaxial Thin Film on Si Toward Giant-Piezoelectric Thin Film for MEMS Actuator Application