Sputter epitaxy of Pb(Zr, Ti)O3 and Pb(Mg1/3, Nb2/3)O3-PbTiO3 Thin Films on Si for high-performance Piezoelectric MEMS

Shinya Yoshida; Shuji Tanaka

Sputter epitaxy of Pb(Zr, Ti)O₃ and Pb(Mg_1/3, Nb_2/3)O₃-PbTiO₃ Thin Films on Si for high-performance Piezoelectric MEMS

研究成果: Conference contribution

本文言語	English
ホスト出版物のタイトル	Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems
編集者	Thomas Otto
出版社	Mesago Messe Frankfurt GmbH
ページ	233-239
ページ数	7
ISBN（印刷版）	9783957350824
出版ステータス	Published - 2018
外部発表	はい
イベント	Smart Systems Integration 2018 - 12th International Conference and Exhibition on Integration Issues of Miniaturized Systems - Dresden, Germany 継続期間: 2018 4月 11 → 2018 4月 12

出版物シリーズ

名前	Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems

Conference

Conference	Smart Systems Integration 2018 - 12th International Conference and Exhibition on Integration Issues of Miniaturized Systems
国/地域	Germany
City	Dresden
Period	18/4/11 → 18/4/12

ASJC Scopus subject areas

コンピュータサイエンスの応用
コンピュータネットワークおよび通信
人工知能

他のファイルとリンク

引用スタイル

Yoshida, S., & Tanaka, S. (2018). Sputter epitaxy of Pb(Zr, Ti)O₃ and Pb(Mg_1/3, Nb_2/3)O₃-PbTiO₃ Thin Films on Si for high-performance Piezoelectric MEMS. In T. Otto (Ed.), Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems (pp. 233-239). (Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems). Mesago Messe Frankfurt GmbH.

Sputter epitaxy of Pb(Zr, Ti)O₃ and Pb(Mg_1/3, Nb_2/3)O₃-PbTiO₃ Thin Films on Si for high-performance Piezoelectric MEMS. / Yoshida, Shinya; Tanaka, Shuji.
Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems. ed. / Thomas Otto. Mesago Messe Frankfurt GmbH, 2018. p. 233-239 (Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems).

研究成果: Conference contribution

Yoshida, S & Tanaka, S 2018, Sputter epitaxy of Pb(Zr, Ti)O₃ and Pb(Mg_1/3, Nb_2/3)O₃-PbTiO₃ Thin Films on Si for high-performance Piezoelectric MEMS. in T Otto (ed.), Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems. Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems, Mesago Messe Frankfurt GmbH, pp. 233-239, Smart Systems Integration 2018 - 12th International Conference and Exhibition on Integration Issues of Miniaturized Systems, Dresden, Germany, 18/4/11.

Yoshida S, Tanaka S. Sputter epitaxy of Pb(Zr, Ti)O₃ and Pb(Mg_1/3, Nb_2/3)O₃-PbTiO₃ Thin Films on Si for high-performance Piezoelectric MEMS. In Otto T, editor, Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems. Mesago Messe Frankfurt GmbH. 2018. p. 233-239. (Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems).

Yoshida, Shinya ; Tanaka, Shuji. / Sputter epitaxy of Pb(Zr, Ti)O₃ and Pb(Mg_1/3, Nb_2/3)O₃-PbTiO₃ Thin Films on Si for high-performance Piezoelectric MEMS. Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems. editor / Thomas Otto. Mesago Messe Frankfurt GmbH, 2018. pp. 233-239 (Smart Systems Integration 2018 - International Conference and Exhibition on Integration Issues of Miniaturized Systems).

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note = "Funding Information: This work was partly supported by JSPS KAKENHI−Grant Number 16K17500 and the Asahi Glass Foundation. This work was also supported by the “Nanotechnology Platform” of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), Japan, at the Center for Integrated Nanotechnology Support, Tohoku University.; Smart Systems Integration 2018 - 12th International Conference and Exhibition on Integration Issues of Miniaturized Systems ; Conference date: 11-04-2018 Through 12-04-2018",

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