抄録
A new surface acoustic wave(SAW) liquid sensor system is described. SAW devices offer many attractive feature for applications as many sensors. In this paper two surface acoustic waves having shear horizontal(SH mode) and shear vertical(R mode) displacement have been used for measuring the acoustic properties of liquid. SH and R mode SAW delay line were constructed on one 36° YX LiTaO3 substrate. The SH mode SAW was excited on the X direction and the R mode SAW was excited on the direction at 90° to X on the substrate by interdigital transducer (IDT). The measurements of the acoustic properties of liquid were performed for water/glycerol mixtures. The experimental results show that the velocity of the SH and R mode SAW depend to the viscosity and the density of the loaded mixtures, respectively. These results indicate that the dual mode SAW sensor is very suitable for determining the acoustic properties of liquid.
| 本文言語 | English |
|---|---|
| ページ | 289-292 |
| ページ数 | 4 |
| 出版ステータス | Published - 1998 12月 1 |
| イベント | Proceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI) - Montreaux, Switz 継続期間: 1998 8月 24 → 1998 8月 27 |
Other
| Other | Proceedings of the 1998 11th IEEE International Symposium on Appliations of Ferroelectrics (ISAF-XI) |
|---|---|
| City | Montreaux, Switz |
| Period | 98/8/24 → 98/8/27 |
ASJC Scopus subject areas
- 電子材料、光学材料、および磁性材料
- 電子工学および電気工学