TY - GEN
T1 - Surface structures of femtosecond laser irradiated 4H-SiC crystal
AU - Tomita, Takuro
AU - Kinoshita, Keita
AU - Matsuo, Shigeki
PY - 2005
Y1 - 2005
N2 - Femtosecond laser induced periodic structures are studied in 4H-SiC. The pulse energy and the pulse interval dependence of laser induced structure are observed by scanning electron microscopy. The formation processes of these structures are discussed.
AB - Femtosecond laser induced periodic structures are studied in 4H-SiC. The pulse energy and the pulse interval dependence of laser induced structure are observed by scanning electron microscopy. The formation processes of these structures are discussed.
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U2 - 10.1109/CLEOPR.2005.1569875
DO - 10.1109/CLEOPR.2005.1569875
M3 - Conference contribution
AN - SCOPUS:33847135332
SN - 0780392426
SN - 9780780392427
T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
SP - 1744
EP - 1745
BT - Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
T2 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2005
Y2 - 11 July 2005 through 15 July 2005
ER -