Synthesis of doped carbon nanotubes by CVD using NiB catalysts

Kosuke Tomita; Naoaki Kawakami; Akihiko Aozasa; Kou Aida; Kazuyoshi Ueno

doi:10.1109/IITC-AMC.2016.7507730

Synthesis of doped carbon nanotubes by CVD using NiB catalysts

Kosuke Tomita, Naoaki Kawakami, Akihiko Aozasa, Kou Aida, Kazuyoshi Ueno

研究成果: Conference contribution

2 被引用数 (Scopus)

抄録

We have proposed a new method for in-situ doping of multiwall carbon nanotubes (MWCNTs) by catalytic CVD using nickel boron (NiB) as the catalyst. Raman spectrum measurements were carried out to determine the effects of doping using NiB catalysts with different B-concentrations at different CVD temperatures. The characteristic shifts in the Raman spectra which indicate carrier doping were demonstrated for the NiB catalyst with 18 atomic % B at the CVD temperature of 900°C. The CNT crystallinity was improved by a new catalyst structure with a B-capping layer over the NiB catalyst.

本文言語	English
ホスト出版物のタイトル	2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference, IITC/AMC 2016
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	198-199
ページ数	2
ISBN（電子版）	9781509003860
DOI	https://doi.org/10.1109/IITC-AMC.2016.7507730
出版ステータス	Published - 2016 7月 8
イベント	2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference, IITC/AMC 2016 - San Jose, United States 継続期間: 2016 5月 23 → 2016 5月 26

Other

Other	2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference, IITC/AMC 2016
国/地域	United States
City	San Jose
Period	16/5/23 → 16/5/26

ASJC Scopus subject areas

ハードウェアとアーキテクチャ
電子工学および電気工学
電子材料、光学材料、および磁性材料
金属および合金
表面、皮膜および薄膜

文献へのアクセス

10.1109/IITC-AMC.2016.7507730

他のファイルとリンク

引用スタイル

Tomita, K., Kawakami, N., Aozasa, A., Aida, K., & Ueno, K. (2016). Synthesis of doped carbon nanotubes by CVD using NiB catalysts. In 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference, IITC/AMC 2016 (pp. 198-199). [7507730] Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IITC-AMC.2016.7507730

Tomita, K, Kawakami, N, Aozasa, A, Aida, K & Ueno, K 2016, Synthesis of doped carbon nanotubes by CVD using NiB catalysts. in 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference, IITC/AMC 2016., 7507730, Institute of Electrical and Electronics Engineers Inc., pp. 198-199, 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference, IITC/AMC 2016, San Jose, United States, 16/5/23. https://doi.org/10.1109/IITC-AMC.2016.7507730

@inproceedings{88b73a09fa914cc7b9a237c19ed9ce7d,

title = "Synthesis of doped carbon nanotubes by CVD using NiB catalysts",

abstract = "We have proposed a new method for in-situ doping of multiwall carbon nanotubes (MWCNTs) by catalytic CVD using nickel boron (NiB) as the catalyst. Raman spectrum measurements were carried out to determine the effects of doping using NiB catalysts with different B-concentrations at different CVD temperatures. The characteristic shifts in the Raman spectra which indicate carrier doping were demonstrated for the NiB catalyst with 18 atomic % B at the CVD temperature of 900°C. The CNT crystallinity was improved by a new catalyst structure with a B-capping layer over the NiB catalyst.",

keywords = "carbon nanotube, catalyst, CVD, doping, NiB",

author = "Kosuke Tomita and Naoaki Kawakami and Akihiko Aozasa and Kou Aida and Kazuyoshi Ueno",

year = "2016",

month = jul,

day = "8",

doi = "10.1109/IITC-AMC.2016.7507730",

language = "English",

pages = "198--199",

booktitle = "2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference, IITC/AMC 2016",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

address = "United States",

note = "2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference, IITC/AMC 2016 ; Conference date: 23-05-2016 Through 26-05-2016",

}

TY - GEN

T1 - Synthesis of doped carbon nanotubes by CVD using NiB catalysts

AU - Tomita, Kosuke

AU - Kawakami, Naoaki

AU - Aozasa, Akihiko

AU - Aida, Kou

AU - Ueno, Kazuyoshi

PY - 2016/7/8

Y1 - 2016/7/8

N2 - We have proposed a new method for in-situ doping of multiwall carbon nanotubes (MWCNTs) by catalytic CVD using nickel boron (NiB) as the catalyst. Raman spectrum measurements were carried out to determine the effects of doping using NiB catalysts with different B-concentrations at different CVD temperatures. The characteristic shifts in the Raman spectra which indicate carrier doping were demonstrated for the NiB catalyst with 18 atomic % B at the CVD temperature of 900°C. The CNT crystallinity was improved by a new catalyst structure with a B-capping layer over the NiB catalyst.

AB - We have proposed a new method for in-situ doping of multiwall carbon nanotubes (MWCNTs) by catalytic CVD using nickel boron (NiB) as the catalyst. Raman spectrum measurements were carried out to determine the effects of doping using NiB catalysts with different B-concentrations at different CVD temperatures. The characteristic shifts in the Raman spectra which indicate carrier doping were demonstrated for the NiB catalyst with 18 atomic % B at the CVD temperature of 900°C. The CNT crystallinity was improved by a new catalyst structure with a B-capping layer over the NiB catalyst.

KW - carbon nanotube

KW - catalyst

KW - CVD

KW - doping

KW - NiB

UR - http://www.scopus.com/inward/record.url?scp=84981332514&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84981332514&partnerID=8YFLogxK

U2 - 10.1109/IITC-AMC.2016.7507730

DO - 10.1109/IITC-AMC.2016.7507730

M3 - Conference contribution

AN - SCOPUS:84981332514

SP - 198

EP - 199

BT - 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference, IITC/AMC 2016

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2016 IEEE International Interconnect Technology Conference / Advanced Metallization Conference, IITC/AMC 2016

Y2 - 23 May 2016 through 26 May 2016

ER -

Synthesis of doped carbon nanotubes by CVD using NiB catalysts

抄録

Other

ASJC Scopus subject areas

文献へのアクセス

他のファイルとリンク

フィンガープリント

引用スタイル