TY - GEN
T1 - Synthesis of nitrogen-doped multilayer graphene film by solid-phase deposition using Co-N catalyst
AU - Fujishima, Yuki
AU - Ueno, Kazuyoshi
N1 - Funding Information:
This research was supported by SIT Research Center for Green Innovation.
Publisher Copyright:
© 2019 IEEE.
PY - 2019/3
Y1 - 2019/3
N2 - A new process using a Co-N catalyst has been developed to perform doping simultaneously with film formation in solid phase deposition method (SPD) which does not require transfer of multilayer graphene (MLG). Nitrogen doping into MLG was confirmed by XPS and UPS and succeeded in reducing sheet resistance by about 36%.
AB - A new process using a Co-N catalyst has been developed to perform doping simultaneously with film formation in solid phase deposition method (SPD) which does not require transfer of multilayer graphene (MLG). Nitrogen doping into MLG was confirmed by XPS and UPS and succeeded in reducing sheet resistance by about 36%.
KW - doping
KW - multilayer graphene
KW - solid-phase deosition
UR - http://www.scopus.com/inward/record.url?scp=85067783107&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=85067783107&partnerID=8YFLogxK
U2 - 10.1109/EDTM.2019.8731097
DO - 10.1109/EDTM.2019.8731097
M3 - Conference contribution
AN - SCOPUS:85067783107
T3 - 2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019
SP - 354
EP - 356
BT - 2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2019 Electron Devices Technology and Manufacturing Conference, EDTM 2019
Y2 - 12 March 2019 through 15 March 2019
ER -