The effect of Substrate Surface Roughness on the Mechanical Properties od DLC Film Deposited by RF Magnetron Sputter Ion Plating from Woodceramics as Target

D. Kaewdook; A. Takasaki; T. Okabe

The effect of Substrate Surface Roughness on the Mechanical Properties od DLC Film Deposited by RF Magnetron Sputter Ion Plating from Woodceramics as Target

D. Kaewdook, A. Takasaki, T. Okabe

地域環境システム専攻

研究成果: Article › 査読

本文言語	English
ジャーナル	Proc. 2nd TSME Intel. Conf. on Mechanical Engineering, 19-21 October, 2011, Krabi, Thailand
出版ステータス	Published - 2011 10月 1

引用スタイル

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