Three-dimensional imaging of carbon nanostructures by scanning confocal electron microscopy

Ayako Hashimoto; Masayuki Shimojo; Kazutaka Mitsuishi; Masaki Takeguchi

doi:10.1063/1.3225103

Three-dimensional imaging of carbon nanostructures by scanning confocal electron microscopy

Ayako Hashimoto, Masayuki Shimojo, Kazutaka Mitsuishi, Masaki Takeguchi

研究成果: Article › 査読

24 被引用数 (Scopus)

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Although scanning confocal electron microscopy (SCEM) shows a promise for optical depth sectioning with high resolution, practical and theoretical problems have prevented its application to three-dimensional (3D) imaging. We employed a stage-scanning system in which only the specimen is moved three dimensionally under a fixed lens configuration, and an annular dark-field (ADF) aperture which blocks direct beams and selects only the scattered electrons. This ADF-SCEM improved depth resolution sufficiently to perform optical depth sectioning. Finally, we succeeded in demonstrating the 3D reconstruction of carbon nanocoils using ADF-SCEM.

本文言語	English
論文番号	086101
ジャーナル	Journal of Applied Physics
巻	106
号	8
DOI	https://doi.org/10.1063/1.3225103
出版ステータス	Published - 2009
外部発表	はい

ASJC Scopus subject areas

物理学および天文学（全般）

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10.1063/1.3225103

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abstract = "Although scanning confocal electron microscopy (SCEM) shows a promise for optical depth sectioning with high resolution, practical and theoretical problems have prevented its application to three-dimensional (3D) imaging. We employed a stage-scanning system in which only the specimen is moved three dimensionally under a fixed lens configuration, and an annular dark-field (ADF) aperture which blocks direct beams and selects only the scattered electrons. This ADF-SCEM improved depth resolution sufficiently to perform optical depth sectioning. Finally, we succeeded in demonstrating the 3D reconstruction of carbon nanocoils using ADF-SCEM.",

author = "Ayako Hashimoto and Masayuki Shimojo and Kazutaka Mitsuishi and Masaki Takeguchi",

note = "Funding Information: We thank Y. Nakayama and K. Hirahara for supplying high-quality carbon nanocoils. We acknowledge Y. Takai and N. de Jonge for giving the helpful advices. A part of this work was financially supported by a Grant-in-Aid for Scientific Research (Grant No. 20760027) from the Japan Society for the Promotion of Science, Japan and the Nuclear Research Funds of the Ministry of Education, Culture, Sports, Science and Technology, Japan.",

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AU - Shimojo, Masayuki

AU - Mitsuishi, Kazutaka

AU - Takeguchi, Masaki

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Three-dimensional imaging of carbon nanostructures by scanning confocal electron microscopy

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