Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure

Hokuto Yamane; Sumito Nagasawa

doi:10.1109/MEMSYS.2015.7050950

Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure

研究成果: Conference contribution

抄録

In this paper we propose a trajectory control method for a MEMS falling object as shown in Figure 1. The MEMS falling object is consisted of two units, an autorotation part and a non-rotation part. The autorotation part keeps its attitude stable with the gyro-effect of the autorotation phenomenon. The non-rotation part keeps a non-rotation state by using the air breaking boards. This non-rotation part controls its falling trajectory and the scattering region. By using large falling objects, aerodynamics of the falling object was characterized, e.g. falling speed, rotational speed, etc. Then the MEMS falling object was designed considering with this aerodynamics. The MEMS falling object was fabricated with a method of the SU-8 multi-layer structure. A MEMS autorotation part whose wing length is 6mm in diameter rotates at 4,800 rpm in the wind-tunnel successfully.

本文言語	English
ホスト出版物のタイトル	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
出版社	Institute of Electrical and Electronics Engineers Inc.
ページ	308-311
ページ数	4
版	February
ISBN（電子版）	9781479979554
DOI	https://doi.org/10.1109/MEMSYS.2015.7050950
出版ステータス	Published - 2015 2月 26
イベント	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal 継続期間: 2015 1月 18 → 2015 1月 22

出版物シリーズ

名前	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
番号	February
巻	2015-February
ISSN（印刷版）	1084-6999

Other

Other	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015
国/地域	Portugal
City	Estoril
Period	15/1/18 → 15/1/22

ASJC Scopus subject areas

電子材料、光学材料、および磁性材料
凝縮系物理学
機械工学
電子工学および電気工学

文献へのアクセス

10.1109/MEMSYS.2015.7050950

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引用スタイル

Yamane, H., & Nagasawa, S. (2015). Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 (February ed., pp. 308-311). [7050950] (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2015.7050950

Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure. / Yamane, Hokuto; Nagasawa, Sumito.

2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. p. 308-311 7050950 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2015-February, No. February).

研究成果: Conference contribution

Yamane, H & Nagasawa, S 2015, Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure. in 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February edn, 7050950, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), no. February, vol. 2015-February, Institute of Electrical and Electronics Engineers Inc., pp. 308-311, 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015, Estoril, Portugal, 15/1/18. https://doi.org/10.1109/MEMSYS.2015.7050950

Yamane H, Nagasawa S. Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure. In 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February ed. Institute of Electrical and Electronics Engineers Inc. 2015. p. 308-311. 7050950. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February). doi: 10.1109/MEMSYS.2015.7050950

Yamane, Hokuto ; Nagasawa, Sumito. / Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure. 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015. February. ed. Institute of Electrical and Electronics Engineers Inc., 2015. pp. 308-311 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); February).

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Trajectory control of MEMS falling object fabricated by SU-8 multilayer structure

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