VERSATILE PROTON BEAM WRITING SYSTEM FOR MICRO FLUIDIC DEVICES

N.T.Phi N.T.Phi, R.Teshima R.Teshima, T.Hasegawa T.Hasegawa, H.Nishikawa H.Nishikawa, Tadahiro Hasegawa

研究成果: Article › 査読

本文言語	English
ページ（範囲）	390-391
ジャーナル	Proceedings of The 5th South East Asian Technical University Consortium (SEATUC) Symposium
出版ステータス	Published - 2010 3月 24

引用スタイル

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title = "VERSATILE PROTON BEAM WRITING SYSTEM FOR MICRO FLUIDIC DEVICES",

author = "N.T.Phi N.T.Phi and R.Teshima R.Teshima and T.Hasegawa T.Hasegawa and H.Nishikawa H.Nishikawa and Tadahiro Hasegawa",

year = "2010",

month = mar,

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language = "English",

pages = "390--391",

journal = "Proceedings of The 5th South East Asian Technical University Consortium (SEATUC) Symposium",

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T1 - VERSATILE PROTON BEAM WRITING SYSTEM FOR MICRO FLUIDIC DEVICES

AU - N.T.Phi, N.T.Phi

AU - R.Teshima, R.Teshima

AU - T.Hasegawa, T.Hasegawa

AU - H.Nishikawa, H.Nishikawa

AU - Hasegawa, Tadahiro

PY - 2010/3/24

Y1 - 2010/3/24

M3 - Article

SP - 390

EP - 391

JO - Proceedings of The 5th South East Asian Technical University Consortium (SEATUC) Symposium

JF - Proceedings of The 5th South East Asian Technical University Consortium (SEATUC) Symposium

ER -