@inproceedings{cc8ce6bfbbae433d89c7f213174810a5,
title = "Versatile proton beam writing system with stage movement",
abstract = "We propose a Proton beam writing (PBW) system with an auto scanning program and stage movement in order to entirely solve the narrow scanning and low design problems of PBW technique. We developed the auto scanning program to transform from 3D CAD (Computer Aided Design) data to scanning pattern data which enables to pattern the complex structures more accurate and much faster. On the other hand, we combined the XY-stage control and electrostatic scanning to expand the fabrication area of our previous system from micrometers range to centimeters range which able to fabricate the whole microstructures network by one exposing time. Our PBW system provides a versatile tool with the unique advantages of proton beam for 3D machining, particularly useful for high-aspect ratio and complicated microstructures.",
keywords = "Auto scanning pattern, Key words, Micro fabrication, Proton beam writing, STL format, XY stage movement",
author = "Nguyen, {Phi T.} and Nobukazu Kawakami and Tadahiro Hasegawa and Hiroyuki Nishikawa",
year = "2012",
month = dec,
day = "1",
doi = "10.1109/NANOMED.2012.6509122",
language = "English",
isbn = "9781467351027",
series = "IEEE International Conference on Nano/Molecular Medicine and Engineering, NANOMED",
pages = "51--55",
booktitle = "NANOMED 2012 - 6th IEEE International Conference on Nano/Molecular Medicine and Engineering",
note = "6th IEEE International Conference on Nano/Molecular Medicine and Engineering, NANOMED 2012 ; Conference date: 04-11-2012 Through 07-11-2012",
}