Zn ion implantation along the c axis for formation of highly resistive GaN layers

Engineering & Materials Science

• Ion implantation 100%
• Ions 68%
• Energy transfer 42%
• Atoms 38%
• Sheet resistance 25%
• High electron mobility transistors 21%
• Spectroscopy 20%
• Annealing 18%
• Crystals 18%
• Hot Temperature 8%

Physics & Astronomy

• ion implantation 67%
• ions 34%
• energy transfer 30%
• current sheets 21%
• high electron mobility transistors 19%
• atoms 18%
• mass spectroscopy 17%
• isolation 17%
• damage 13%
• annealing 11%
• characterization 10%
• profiles 10%
• crystals 8%
• energy 5%

Chemical Compounds

• Ion Implantation 90%
• Sheet Resistance 29%
• Electron Mobility 29%
• Ion 29%
• Secondary Ion Mass Spectroscopy 26%
• Energy 23%
• Energy Transfer 21%
• Annealing 19%